semiconductor processing like technology of removal defect, accuracy of pattern and registration. But recently as directed self-assembly(DSA) technology is advanced, that can reduce the defect of pattern which is substitution of existing optical lithography technology and will be important role in making semiconductor minute pattern.
Naturally, the DSP has also demerits. If we use anodic alumi
1. Industry
1-1 Introduction the semiconductor industry
1. Semiconductor industry
Semiconductors are extremely important in virtually all areas of life. They are vital for many consumer products.
This industry has changed society in uncountable ways. Semi- conductors are installed in virtually all technical equipment, ranging from dish- washers, microwave ovens and flat screens to machine to
semiconductor, IC, nuclear fusion reactor and etcetera. Recently, high vacuum is especially used in aerospace industry and process of solar cell.[1]
Ultra High Vacuum
Definition.
Ultra high vacuum region is defined as the pressure lower than 10 to the minus 8.
Generally, there are three steps to make Ultra high vacuum (UHV), Roughing pump, High vacuum pump and Ultra high vacuum pump. Aft
1. Dry Etch; PR 등의 보호막으로 가려져 있지 않은 부위의 막질 제거
2. Ashing; PR 제거
3. Plasma Nitridation; 얇은 산화막 등 유전막의 특성 개선을 위한 표면 처리
4. Plasma Oxidation; Transistor의 특성 개선을 위한 표면 처리
5. 유전막 PE-CVD (Plasma Enhanced Chemical Vapor Deposition); SiON 등의
유전막 증착
6. Barrier Meta